1-Adamantyl methacrylate

Catsyn offer gram to tons of 1-Adamantyl methacrylate | CAS 16887-36-8, its formula is C14H20O2, molecular weight is 220.31g/mol and the purity is usually NLT 98%.

The electronic properties of this compound are primarily determined by its large adamantyl group. This highly saturated cage-like hydrocarbon structure imparts very low polarity, low dielectric constant, and excellent optical transparency, especially in the deep ultraviolet region (particularly at 248 nm and below). The methacrylate portion provides the necessary polymerization reactivity and moderate dipole characteristics, allowing the monomer to effectively participate in copolymerization while maintaining high transparency and chemical stability. It also serves as a key structural unit for regulating the rigidity and free volume of the polymer chain.

In the field of photoresists, this monomer is one of the key hydrophobic monomers for chemically amplified photoresists, especially for 248 nm (KrF) photolithography. Its rigid adamantyl backbone significantly enhances the glass transition temperature, mechanical strength, and dry etch resistance of the polymer resin, providing critical structural support and process resistance for the photoresist pattern. During the photolithography process, it typically co-polymerizes with polar monomers containing acid-sensitive protective groups as a non-polar component. Upon exposure, the photoacid catalyzes the deprotection of the polar groups, inducing a drastic change in the polarity and solubility of the exposed resin. The rigid backbone provided by this monomer unit ensures precise and stable pattern shapes during this transition, making it an essential foundation for achieving high-resolution patterns.